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![A diagram of this micro-mechanical piezoelectric pump [12]. | Download Scientific Diagram](https://www.researchgate.net/publication/281669768/figure/fig1/AS:613934541332494@1523384809386/A-diagram-of-this-micro-mechanical-piezoelectric-pump-12.png "A diagram of this micro-mechanical piezoelectric pump [12]. | Download Scientific Diagram")
A diagram of this micro-mechanical piezoelectric pump [12]. | Download Scientific Diagram
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